Compact ultra-fast vertical nanopositioner for improving scanning probe microscope scan speed
- Creator: Kenton, Brian J. , Fleming, Andrew J. , Leang, Kam K.
- Resource Type: journal article
- Date: 2011
Ultra-fast dual-stage vertical positioning for high performance SPMs
- Creator: Fleming, Andrew J. , Kenton, Brian J. , Leang, Kam K.
- Resource Type: conference paper
- Date: 2010